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Tropel® FlatMaster®

Tropel® FlatMaster® SAW System

Tropel® FlatMaster® SAW

Tropel® FlatMaster® SAW System

Tropel® FlatMaster® SAW System

The Tropel® FlatMaster® Semi-Automated Wafer Metrology Module continues our 40 year tradition of providing metrology solutions to semiconductor wafer manufacturers. Designed for volume wafer production, this automated system offers superior performance in rapid, repeatable, accurate, non-contact qualification of silicon and alternative substrate wafers.

The FlatMaster® Semi-Automated Wafer flatness analysis system integrates a grazing-incidence interferometer with automated staging for improved wafer loading and measurement repeatability. The FlatMaster® Semi-Automated Wafer can be configured to measure wafer sizes from 2 inches to 8 inches in diameter, is field upgradable to full automation and sorting, and is well suited for a variety of different materials including silicon carbide, gallium arsenide, sapphire, quartz, germanium, silicon, and many others.

The power of grazing-incidence interferometry that makes the Tropel® FlatMaster® System an industry standard for precision flatness is offered on the Tropel® UltraSort™ Automated Wafer Analysis System.

 

Product Information Sheet