Corning Incorporated (NYSE: GLW) today announced it has commercialized the Tropel® UltraFlat™ for EUV system, a new photomask measurement system designed to help semiconductor manufacturers meet new flatness requirements for extreme ultraviolet (EUV) semiconductor lithography.
Starting in 2018, flatness specifications for EUV in the semiconductor industry are expected to be below 10 nanometers in variation. Until now, the current metrology infrastructure could not meet these tightened specifications.
The Tropel UltraFlat system for EUV is designed specifically to enable blank manufacturers and photomask shops to develop the processes required to achieve the stringent overlay requirements for EUV lithography, helping to deliver increased yields and manufacturing efficiencies.
"Based on our experience working closely with photomask and semiconductor manufacturers, we knew that flatness would become significantly more important for EUV,” said David Velasquez, commercial director, Corning Advanced Optics. “We've worked for over two years to understand the requirements and develop a solution that not only dramatically improves our measurement capabilities, but also collects the critical information photomask shops need to optimize their own development and operations efforts. By leveraging our core technologies in optical physics, Corning is able to introduce the UltraFlat for EUV system, which further extends our leadership into EUV lithography.”
Katherine Ballman, applications engineer, Corning Specialty Materials, will present a technical paper detailing Corning’s research in this area. The paper, titled “Error Analysis of Overlay Compensation Methodologies and Proposed Functional Tolerances for EUV Photomask Flatness,” will be presented on April 8, at Photomask Japan in Osaka.
Corning manufactures a complete line of non-contact optical metrology systems in its Fairport, New York, facility. These systems, designed to operate in a wide range of environments, quickly and accurately measure surfaces for flatness, parallelism, height, depth, surface finish or thickness. To learn more visit: http://www.corning.com/metrology.
Forward-Looking and Cautionary Statements
This press release contains “forward-looking statements” (within the meaning of the Private Securities Litigation Reform Act of 1995), which are based on current expectations and assumptions about Corning’s financial results and business operations, that involve substantial risks and uncertainties that could cause actual results to differ materially. These risks and uncertainties include: the effect of global political, economic and business conditions; conditions in the financial and credit markets; currency fluctuations; tax rates; product demand and industry capacity; competition; reliance on a concentrated customer base; manufacturing efficiencies; cost reductions; availability of critical components and materials; new product commercialization; pricing fluctuations and changes in the mix of sales between premium and non-premium products; new plant start-up or restructuring costs; possible disruption in commercial activities due to terrorist activity, armed conflict, political or financial instability, natural disasters, adverse weather conditions, or major health concerns; adequacy of insurance; equity company activities; acquisition and divestiture activities; the level of excess or obsolete inventory; the rate of technology change; the ability to enforce patents; product and components performance issues; retention of key personnel; stock price fluctuations; and adverse litigation or regulatory developments. These and other risk factors are detailed in Corning’s filings with the Securities and Exchange Commission. Forward-looking statements speak only as of the day that they are made, and Corning undertakes no obligation to update them in light of new information or future events.
Digital Media Disclosure
In accordance with guidance provided by the SEC regarding the use of company websites and social media channels to disclose material information, Corning Incorporated (“Corning”) wishes to notify investors, media, and other interested parties that it intends to use its website (http://www.corning.com/worldwide/en/about-us/news-events.html) to publish important information about the company, including information that may be deemed material to investors. The list of websites and social media channels that the company uses may be updated on Corning’s media and website from time to time. Corning encourages investors, media, and other interested parties to review the information Corning may publish through its website and social media channels as described above, in addition to the company’s SEC filings, press releases, conference calls, and webcasts.
About Corning Incorporated
Corning (www.corning.com) is one of the world’s leading innovators in materials science. For more than 160 years, Corning has applied its unparalleled expertise in specialty glass, ceramics, and optical physics to develop products that have created new industries and transformed people’s lives. Corning succeeds through sustained investment in R&D, a unique combination of material and process innovation, and close collaboration with customers to solve tough technology challenges. Corning’s businesses and markets are constantly evolving. Today, Corning’s products enable diverse industries such as consumer electronics, telecommunications, transportation, and life sciences. They include damage-resistant cover glass for smartphones and tablets; precision glass for advanced displays; optical fiber, wireless technologies, and connectivity solutions for high-speed communications networks; trusted products that accelerate drug discovery and manufacturing; and emissions-control products for cars, trucks, and off-road vehicles.