Applications | Advanced Analytic and Metrology Instruments | Corning

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Analytic Instruments Applications

Analytic Instruments Applications

Corning Tropel Analytic Instruments Applications

Flatness and form of flat surfaces is critical to a variety of key applications

Corning Tropel Metrology Instruments improve manufacturing capability and yield, increasing our customers’ profitability in a variety of applications:
 

  • Semiconductor Wafers
  • Semiconductor Photomasks
  • Hydraulic Components
  • Diesel Fuel Injection Systems
  • Compressors/Pumps
  • High-End Rotary Seal Faces
  • Hard Disk Drives
  • Trace Gas Analysis
  • Specialized Ophthalmic Molds

Photomask Applications

  • Ground/Polished
  • Coated/Uncoated
  • Patterned/Pelliclized
  • Cassette to Cassette

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Pelliclized Photomask Applications

  

Semiconductor Wafer Applications

 

 

 

 

  • Glass
  • Si
  • Silicon Carbide
  • GaN
  • Sapphire
  • GaAs
  • Lithium Niobate
  • Lithum Tantalate
  • Quartz

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  • Bow/Wrap
  • Sori/Sag
  • TTV/GBIR
  • NTV/GFLR
  • LTV/SBR
  • LTIR/SFQR

Thin Film Measurements

Stoney's Equation
Stoey's Equation describes the stress in a film deposited on a surface as a function of the change in curvature of the substrate that occurs after the film is deposited.

Specifically:

= the stress in the thin film
= Elastic Modulus for the substrate
= Poisson's Ratio for the substrate
= thickness of the film
= thickness of the substrate

Glass Applications - Thickness and Index Variation

  • Measure thickness, TTV, front and back flatness simultaneously
  • Extract absolute index and index homogeneity

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Tropel FlatMaster MSP Applications

Frequency Stepping Interferometry

  • Fast data collection over large vertical dynamic range
  • Full surface and multi-surface
  • Z-heights to 300mm

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Rotary Seal Faces

  • Flatness
  • Form
  • Depth
  • Full surface
  • Sub-micron
  • Stitchin/automation for large surfaces

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Fuel Cells

  • Analyze flow field and measure sealing surface flatness at the same time in just seconds!
  • Metals, polymers, ceramics, glass and more
  • Surface finishes from ground to polished

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Typical Industrial Applications

  • Mechanical Seals
  • Fuel Injectors
  • Precision Pumps
  • Hydraulics
  • Ceramics
  • Flat Disks

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