markets
display optics/components
semiconductor optics/components

applications
Lenses for lithography stepper cameras

contact
specialtymaterials@corning.com

Whether for microlithography lenses, lithography, vision correction, industrial applications or other excimer laser applications, performance and "up time" are critically dependent on fluoride optical quality. Corning’s world-class knowledge of materials, combined with 50 years of calcium fluoride manufacturing experience enables the company to offer its customers high-performance fluoride optics. Corning continually refines its manufacturing processes to ensure precise performance and predictability over the lifetime of its materials.

additional information
CaF2 Product Information Sheet
MgF2 Product Information Sheet
0.85 Numerical Aperture Calcium Fluoride System Tested Using 157 nm Light
CaF2 Today
CaF2 Today! <111>and <100>Crystal Orientations
Fluence-Dependent Transmission (FDT) of Calcium Fluoride
Fluence-Dependent Transmission (FDT) of Calcium Fluoride (2)
Light scattering in CaF2 and fused silica for DUV applications
Motivation and Experimental Approach
Performance Enhancement of 157 nm Newtonian Catadioptric Objectives Using CaF2 Material