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materials + products
UV
Filter Glass
Image Mask Blanks
HPFS®
glass material
Fluoride Crystals
ULE®
glass material
EAGLE2000® Industrial Grade Substrate
Reflectors
Specialty Glasses
applications
LCD stepper lenses
Pattern lithography
Pattern inspection
CF and TFT applications
LCD Lithography Optics and Components
LCD projection systems
LCOS projection systems
High quality lens blanks for projection lens systems/televisions
Excimer VUV/O3 Cleaner window blanks for LCD manufacturing process
capabilities
Advanced lens assembly
Precision optics and sub assembly
Precision glass gobs for repressing
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Corning’s leadership in the display market, its vast experience in lithography
and inspection in the semiconductor market, and its rich history of innovative
research and development, ensure that Corning delivers unmatched,
performance-driven lithography and inspection products, as well as optical
materials and processes for the display optics industry. As an integral part of
its process, Corning partners with customers to work through material,
manufacturing and systems integration challenges and together deliver
integrated optical solutions.
additional information
Evaluation of New Mask Materials for Improved Lithography Performance
Lifetime
Modeling of Laser-Induced Density and Refractive Index Changes in Fused Silica
Used in DUV Microlithography
157nm System Test for High-NA Lithographic Lens Systems
Material Qualification: Enabling Tomorrow’s Lithography Today Corning’s
Semiconductor Materials Metrology
Poster Presentations SPIE Microlithography Conference Reception
Printing
0.1 mm structures with a 244nm µCAT™ Cheetah Objective using Imaging
Interferometric Lithography
Ultra-High Accuracy Measurement of the Coefficient of Thermal Expansion for
Ultra Low Expansion Materials
contact
specialtymaterials@corning.com
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