ULE®, Corning Code 7972 Ultra Low Expansion Glass is a titania silicate glass with unique characteristics that has made it the material of choice in applications for the space industry in maintaining the critical performance of optical systems at extreme temperatures. ULE is used in a broad array of applications from machine tool reference blocks to solid and lightweight mirror blanks for larger astronomical telescopes and space satellite applications.
Corning's ULE® glass has also been identified by leading semiconductor industry experts as the "material of choice" for EUV applications.
TSGTM, Titania Silicate Low Expansion Glass is the newest member of Corning's titania silicate low expansion glass family. TSG has a similar composition to ULE® and is made using the same flame deposition process. TSG has a relaxed absolute coefficient of thermal expansion (CTE) requirement for those applications that do not require a zero-CTE material, however CTE variation remains controlled through process discipline.
Additional information:ULE® Product Information Sheet
TSG Product Information Sheet
:Characterization and Characteristics of a ULE® Glass Tailored for the EUVL Needs Improved Characteristics of ULE® Glass for Meeting EUVL Needs Ultra-High Accuracy Measurement of the Coefficient of Thermal Expansion for Ultra Low Expansion Materials
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