Corning’s HPFS glass is known throughout the semiconductor industry for its consistent, repeatable performance. World-class metrology capabilities play a major role in Corning’s ability to produce large quantities of HPFS glass materials from projection and illuminator lens blanks to leading-edge imagemask blanks.
HPFS is a high-purity synthetic amorphous silicon-dioxide material manufactured by flame deposition. The noncrystalline, colorless, silica glass combines a very low thermal-expansion coefficient with excellent optical qualtities and exceptional transmittance. Characteristics include homogeneity, low birefringence, large diameters, and outstanding transmittance in the infrared, visible, ultraviolet ,and deep-ultraviolet ranges.
Additional Information : HPFS Industrial-Grade Product Information Sheet HPFS Standard-Grade Product Information Sheet HPFS KrF-Grade Product Information Sheet HPFS ArF-Grade Product Information Sheet HPFS ArF-Grade for 193mn Immersion Lithography (8650) Product Information Sheet
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