Tropel® µCAT™
All materials selected for use in the µCAT objectives are
ultra-low outgassing to minimize sources of contamination.
Superior Design, Performance and Flexibility
Superior Design, Performance and Flexibility
Corning’s Tropel® µCAT™ family of catadioptric, long working distance micro-objectives are designed for use down to Deep Ultraviolet wavelengths. The µCAT’s superior design attributes outperform Schwarzschild objectives. Before considering an all-mirror system, take a closer look at the Tropel µCAT.
Benefits
The µCAT design incorporates reflective and refractive elements, resulting in a micro-objective with high numerical aperture, long working distance and low obscuration. High resolution and advantaged light collection, with a working distance that can work with a pellicle, the µCAT’s features combine performance and flexibility in a cost effective solution.
About Our Product
Keeping Costs Down
Keeping Costs Down
The µCAT designs can provide sufficient bandwidth to accommodate lamp-based systems, eliminating the need for expensive laser sources and lowering the overall cost of your system.
The µCAT designs can provide sufficient bandwidth to accommodate lamp-based systems, eliminating the need for expensive laser sources and lowering the overall cost of your system.
Less Obscuration Improves Performance
Less Obscuration Improves Performance
Central obscuration within the lens has a direct effect on the mid-frequency modulation transfer function (MTF) (i.e. image contrast). The µCAT’s design reduces the amount of obscuration, and improves the mid-frequency MTF. The amount of central obscuration in the µCAT design can be as low as 15%, while typical Schwarzschild objectives have greater than 35% central obscuration.
Another feature of the µCAT design is the use of a "floating" secondary mirror, thereby eliminating mechanical struts or "spiders", which when present in other micro-objectives, obstruct some light from passing through the system. By eliminating these struts, there is also a reduction in unwanted diffraction effects that are present in many reflective micro-objective systems.
Central obscuration within the lens has a direct effect on the mid-frequency modulation transfer function (MTF) (i.e. image contrast). The µCAT’s design reduces the amount of obscuration, and improves the mid-frequency MTF. The amount of central obscuration in the µCAT design can be as low as 15%, while typical Schwarzschild objectives have greater than 35% central obscuration.
Another feature of the µCAT design is the use of a "floating" secondary mirror, thereby eliminating mechanical struts or "spiders", which when present in other micro-objectives, obstruct some light from passing through the system. By eliminating these struts, there is also a reduction in unwanted diffraction effects that are present in many reflective micro-objective systems.
High Performance Applications
High Performance Applications
Because of the low obscuration incorporated into the design, the µCAT can be used in inspection applications with partial coherent illumination conditions, or to inspect images on reticles and wafers. µCAT objectives are currently utilized in OEM applications including photomask and wafer inspection and writing.
Because of the low obscuration incorporated into the design, the µCAT can be used in inspection applications with partial coherent illumination conditions, or to inspect images on reticles and wafers. µCAT objectives are currently utilized in OEM applications including photomask and wafer inspection and writing.